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Florian Fern
Florian Fern
Verified email at tu-ilmenau.de
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Year
Tip-and laser-based 3D nanofabrication in extended macroscopic working areas
I Ortlepp, T Fröhlich, R Füßl, J Reger, C Schäffel, S Sinzinger, S Strehle, ...
Nanomanufacturing and Metrology 4 (3), 132-148, 2021
152021
Fundamental investigations in the design of five-axis nanopositioning machines for measurement and fabrication purposes
R Schienbein, F Fern, R Theska, S Supreeti, R Füßl, E Manske
Nanomanufacturing and metrology 4, 156-164, 2021
102021
Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base
F Fern, R Füßl, G Eichfelder, E Manske, M Kühnel
Measurement Science and Technology 32 (4), 045001, 2021
72021
Metrologie in fünfachsigen Nanomess-und Nanopositioniermaschinen
F Fern
Institut für Prozessmess- und Sensortechnik, 2020
62020
Efficient empirical determination of maximum permissible error in coordinate metrology
A Thompson, N Southon, F Fern, G Stupfler, R Leach
Measurement Science and Technology 32 (10), 105013, 2021
52021
Novel monolithic pendulum tiltmeter with Nanorad resolution
M Kühnel, F Fern, T Fröhlich
tm-Technisches Messen 85 (4), 244-251, 2018
52018
In-situ-Messung von Bewegungsabweichungen serieller Rotationsachsen zur Anwendung in Nanomessmaschinen/In situ error measurement of serial rotational devices for the …
F Fern, R Schienbein, R Theska, R Füßl, M Kühnel, L Weidenfeller, ...
tm-Technisches Messen 86 (s1), 77-81, 2019
42019
Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines
F Fern, R Füßl, R Schienbein, R Theska
Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018
32018
Development and implementation of a rotating nanoimprint lithography tool for orthogonal imprinting on edges of curved surfaces
S Supreeti, R Schienbein, P Feßer, F Fern, M Hoffmann, S Sinzinger
Nanomanufacturing and Metrology 4 (3), 175-180, 2021
22021
Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz
F Fern, R Füßl, E Manske, R Schienbein, R Theska, I Ortlepp, ...
tm-Technisches Messen 88 (2), 61-70, 2021
22021
Measurement uncertainty analysis on a five-axis nano coordinate measuring machine NMM-5D following a vectorial approach
F Fern, R Fuessl, E Manske, R Schienbein, R Theska, I Ortlepp, ...
TM-TECHNISCHES MESSEN 88 (2), 61-70, 2021
22021
Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier-und Nanomessmaschinen/Applications of a fiber coupled chromatic confocal sensor in …
J Kirchner, R Mastylo, U Gerhardt, F Fern, L Weidenfeller, T Sasiuk, ...
tm-Technisches Messen 86 (s1), 17-21, 2019
22019
Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines
J Kirchner, R Mastylo, U Gerhardt, F Fern, R Schienbein, L Weidenfeller, ...
TM-TECHNISCHES MESSEN 86, S17-S21, 2019
12019
Correction: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes
R Schienbein, F Fern, R Theska, S Supreeti, R Füßl, E Manske
Nanomanufacturing and Metrology 5 (4), 437-437, 2022
2022
euspen’s 21st International Conference & Exhibition, Copenhagen, DK, June 2021
I Ortlepp, F Fern, R Schienbein, S Supreeti, R Füßl, R Theska, S Sinzinger, ...
euspen’s 19th International Conference & Exhibition, Bilbao, ES, June 2019
R Schienbein, F Fern, R Theska, R Füßl
euspen’s 18th International Conference & Exhibition, Venice, IT, June 2018
R Schienbein, F Weigert, F Fern, R Theska, R Füßl
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