| BEOL embedded RF-MEMS switch for mm-wave applications M Kaynak, KE Ehwald, J Drews, R Scholz, F Korndörfer, D Knoll, B Tillack, ... 2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009 | 64 | 2009 |
| Silicon cylinder spiral coil for nuclear magnetic resonance spectroscopy of nanoliter samples S Leidich, M Braun, T Gessner, T Riemer Concepts in Magnetic Resonance Part B: Magnetic Resonance Engineering: An …, 2009 | 21 | 2009 |
| Micro arc welding for electrode gap reduction of high aspect ratio microstructures M Nowack, S Leidich, D Reuter, S Kurth, M Kuechler, A Bertz, T Gessner Sensors and Actuators A: Physical 188, 495-502, 2012 | 19 | 2012 |
| A fast and low actuation voltage MEMS switch for mm-wave and its integration A Akiba, S Mitarai, S Morita, K Ikeda, S Kurth, S Leidich, A Bertz, ... 2010 International Electron Devices Meeting, 36.4. 1-36.4. 4, 2010 | 10 | 2010 |
| Continuously tunable RF-MEMS varactor for high power applications S Leidich, S Kurth, T Gessner 2008 IEEE MTT-S International Microwave Symposium Digest, 1267-1270, 2008 | 9 | 2008 |
| Rotation angle sensor system, lidar system, work device and operating method for a LIDAR system F Utermoehlen, S Leidich US Patent 11,112,492, 2021 | 8 | 2021 |
| Reliability enhancement of Ohmic RF MEMS switches S Kurth, S Leidich, A Bertz, M Nowack, J Frömel, C Kaufmann, W Faust, ... Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and …, 2011 | 7 | 2011 |
| Sensor arrangement for the contactless sensing of angles of rotation on a rotating part S Leidich, J Oberlaender, O Krayl US Patent 10,458,815, 2019 | 5 | 2019 |
| Sensor arrangement for the contactless sensing of angles of rotation on a rotating part S Leidich, R Ameling US Patent 10,330,498, 2019 | 5 | 2019 |
| 24 GHz RF-MEMS phase shifter with non-galvanic electromagnetic coupling fabricated in silicon-bulk technology S Voigt, S Leidich, W Doetzel, S Kurth, T Gessner Journal of Physics: Conference Series 34 (1), 228, 2006 | 5 | 2006 |
| Coil assembly and corresponding measuring assembly T Buck, A Merz, O Krayl, S Leidich US Patent 11,268,832, 2022 | 3 | 2022 |
| Rotation angle sensor system, lidar system, and work device F Utermoehlen, J Sparbert, R Has, S Leidich US Patent 11,125,585, 2021 | 3 | 2021 |
| Rotation angle sensor system, lidar system, work device and operating method for a lidar system F Utermoehlen, S Leidich US Patent App. 16/021,241, 2019 | 3 | 2019 |
| Sensor Arrangement for Sensing Rotation Angles on a Rotating Component in a Vehicle R Has, S Leidich, M Kienzle US Patent App. 14/705,312, 2015 | 3 | 2015 |
| Low temperature wafer bonding technologies M Haubold, M Baum, I Schubert, S Leidich, M Wiemer, T Gessner 18th European Microelectronics & Packaging Conference, 1-8, 2011 | 3 | 2011 |
| Compact meta-material transmission line balun based on meander lines structure and MEMS technology C Huang, D Chen, S Leidich, T Gessner Microelectronic engineering 87 (4), 584-587, 2010 | 3 | 2010 |
| Sensor system for determining at least one rotational characteristic of an element rotating about at least one axis of rotation A Yashan, D Oshinubi, F Utermoehlen, S Leidich US Patent App. 16/469,220, 2020 | 2 | 2020 |
| Novel post-process gap reduction technology of high aspect ratio microstructures ultilizing micro welding M Nowack, S Leidich, D Reuter, S Kurth, M Küchler, A Bertz, T Gessner 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 2 | 2011 |
| Slot-antenna for autonomous sensor systems mounted on overhead power lines S Leidich, S Voigt, A Gratias, T Keutel, S Kurth, T Gessner 2011 IEEE MTT-S International Microwave Symposium, 1-4, 2011 | 2 | 2011 |
| Linear displacement sensor I Herrmann, F Utermoehlen, A Merz, S Leidich US Patent 10,724,876, 2020 | 1 | 2020 |
