Follow
Robert Belan
Robert Belan
Kurt J. Lesker
Verified email at lesker.com
Title
Cited by
Cited by
Year
Absence of negative ion effects during on‐axis single target sputter depositions of Y‐Ba‐Cu‐O thin films on Si (100)
M Migliuolo, RM Belan, JA Brewer
Applied physics letters 56 (25), 2572-2574, 1990
371990
Magnetron sputter deposition of magnetic materials from thick targets
JA Brewer, M Migliuolo, RM Belan
Proc. Annu. Tech. Conf. Soc. Vac. Coaters 33, 37-42, 1990
61990
Rectangular Hollow Sputter Source and Method of use Thereof
RM Belan, KJ Lesker III
US Patent App. 14/868,688, 2016
12016
Surrounding field sputtering source
M Jaszcar, RM Belan, KJ Lesker III
US Patent 10,358,713, 2019
2019
Hermetically sealed magnetic keeper cathode
M Jaszcar, RM Belan, R Patterson
US Patent 10,115,574, 2018
2018
Absence of Oxygen Resputtering During On-Axis Single Target Depositions ofY-Ba-Cu-O Thin Films
M Migliuolo, RM Belan, JA Brewer, PA Clairton
High TeDlperature Superconductivity, 403, 0
The system can't perform the operation now. Try again later.
Articles 1–6